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发明名称
摘要
申请公布号
JP2862373(B2)
申请公布日期
1999.03.03
申请号
JP19900340498
申请日期
1990.11.30
申请人
SHINKO DENKI KOGYO KK
发明人
SAKAMOTO MASAYUKI
分类号
B65H1/28;B65G1/07;H01L21/50;(IPC1-7):H01L21/50
主分类号
B65H1/28
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代理人
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