SHAFT SEALING ELEVATOR SYSTEM

摘要

The single sealing elevator system for conveying a semiconductor wafer, while maintaining sealing of a chamber, comprises: a power generator(1) for driving the single sealing elevator system; a ball screw(2) rotated by receiving the power from the power generator(1); a connector inserted into the interior of the ball screw(2) for converting the rotary movement of the ball screw(2) into a straight line movement; a shaft(4) connected to the connector(3) and conveyed up and down; a cassette plate(5) connected to the shaft(4) and conveyed up and down; a ball bush housing(7) having a ball bush(6) for surrounding the peripheral surface of the shaft(4) on the interior thereof to thereby convey the shaft(4) accurately; a supporting plate(8) coupled to the ball screw(2) to support the single sealing elevator system; a body(9) serving to enlarge the space where the shaft(4) and the connector(3) are conveyed up and down and coupled with the ball bushing housing(7) and the supporting plate(8); and a sealing housing(10) serving to maintain the sealing within a chamber.