APPARATUS FOR ALIGNING A RETICLE USING POSITION SENSITIVE DETECTOR AND METHOD OF ALIGNING A RETICLE

摘要

PURPOSE: A method and an apparatus for aligning a reticle are provided to measure the rotation of the reticle and to achieve the high accuracy of a position alignment by using a position sensing device. CONSTITUTION: A reticle aligning device comprises a semiconductor laser module(201) including a semiconductor laser(210) and a collimator lens(211) for generating a parallel laser beam(202). A prism(203) is provided to refract the parallel laser beam(202) generated from the semiconductor layer module(201) at a right angle. Slits(205) are formed in a reticle(204) to allow the refracted laser beam to pass through the reticle(204). A position sensing device(206) is provided to detect the position of the parallel laser beam which passes through the slit(205) of the reticle(204).