| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily initialize a stage having no yaw guide which is not provided with coarse and fine moving structure driven by a linear motor. SOLUTION: Restriction mechanisms (81, 82, 85, 86) are provided to couple a stage RST to a fixer 58 for restricting the movement thereof in the X direction (andθdirection), when the stage RST is driven in the direction approaching the fixer 58 with a driving force of an actuator 56. Namely, even if the stage RST has no coarse and fine moving structure or no yaw guide, since the movement in the X direction almost orthogonally crosses the long stroke direction (Y direction) can be restricted, the preconditions for magnetic pole positioning of a linear motor (48B or the like) for driving the stage in the Y direction can be satisfied as a result, and moreover initialization of stage can be executed easily.</p> |
