METHOD AND DEVICE FOR PRODUCT PROGRESS CONTROL

摘要

PROBLEM TO BE SOLVED: To control a progress state of the processing of a product according to the progress states of processes of relative products. SOLUTION: A process state managing means 11 manages the states of processes of respective lots of process devices constituting an LSI development trial manufacturing line as product process state information. A progress state gathering means 12 gathers the progress state of the process of a 1st lot according to the product process state information. A process plan extracting means 13 extracts the process plan of the 1st lot from previously set process plans of respective lots. A process priority changing means 14 changes the process priority of the 1st lot and a 2nd relative lot according to the result of comparison between the progress state of the process of the 1st lot and the process plan of the 1st lot.