| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-axis type flattening device for significantly heightening surface accuracy of a workpiece. SOLUTION: This device comprises a rotary spindle provided with a processing tool at a tip, moving upward and downward and having a flange, and a chuck table brought into contact with the processing tool, and fixing and rotating the workpiece to be surface processed. The flange of the rotary spindle is connected with a sliding element, and an outer periphery of the sliding element is slidably fitted with a three-axis guide element. The guide element stands at a position of each geometrical triangle vertex, and the sliding element is moved by a transferring device paired with the guide element. COPYRIGHT: (C)2005,JPO&NCIPI
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