| 摘要 |
PROBLEM TO BE SOLVED: To easily perform maintenance operations to a washing tank or the like, to prevent the generation of failures at the time when water intrudes into the washing tank, and to secure the suitable evaporation quantity and condensation quantity in a solvent as for the improvement of the structure of a washing facility. SOLUTION: A washing facility 1 is provided with: a washing tank for washing a workpiece 2 as the object to be washed by using a solvent; a heater 7 for heating and evaporating the solvent; a cooler 8 for condensing the vapor of the evaporated solvent and recovering the same; a workpiece transport apparatus 9 for holding the workpiece 2 and dipping the same into the washing tank; a rotary driving apparatus 10 for relatively rotating either the workpiece transport apparatus 9 or the washing tank; and an elevation driving apparatus 11 for elevating and lowering the workpiece transport apparatus 9. In the washing facility 1, at least either the rotary driving apparatus 10 or the elevation driving apparatus 11 is arranged above the washing tank, and further, the one arranged above the washing tank out of the rotary driving apparatus 10 and the elevation driving apparatus 11 is made attachable and detachable to the washing tank. COPYRIGHT: (C)2005,JPO&NCIPI
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