发明名称 MEMS optical components
摘要 An optical network (100), an optical device, and one or more MEMS optical components (105, 106) are disclosed. The optical network comprises one or more optical input sources (101), one or more optical output collectors (102), and the optical device. The optical device is optically coupled between the one or more optical input sources and the one or more optical output collectors. The optical device is formed on an integrated MEMS chip (104). The optical device comprises the one or more MEMS optical components formed on the integrated MEMS chip. In fact, each MEMS optical component may be monolithically fabricated on, self assemblable on, and reconfigurable or moveable on the integrated MEMS chip.
申请公布号 US6859299(B1) 申请公布日期 2005.02.22
申请号 US20010009985D 申请日期 2001.12.11
申请人 CHIAO JUNG-CHIH 发明人 CHIAO JUNG-CHIH
分类号 G02B6/26;G02B6/34;G02B6/35;G02B26/08;(IPC1-7):G02B26/00;G02B6/12;H01S3/08 主分类号 G02B6/26
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