| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a protective film by which the protective film having excellent wear resistance and corrosion resistance can be manufactured without heating a substrate to a high temperature, and to provide the protective film. SOLUTION: In this manufacturing method, a protective film is deposited on the substrate by an aerosol deposition method in which powder containing silicon compound (SiC or SiN) is sprayed to the substrate together with carrier gas such as helium at the spraying particle speed of≥800 m/s from very small nozzles. According to the manufacturing method, the protective film having excellent adhesiveness to the substrate can be obtained without exposing the substrate to high temperature. The thickness of the protective film is preferably 0.5-40μm. The Vickers hardness of the protective film is preferably≥500. COPYRIGHT: (C)2005,JPO&NCIPI
|
