SPIN COAT METHOD, LOW DIELECTRIC CONSTANT INSULATION MEMBRANE, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To form insulation membrane with superior mechanical strength, a dielectric constant, or membrane adhesiveness, related to a spin coat method, low dielectric constant insulation membrane and semiconductor device. SOLUTION: A gas phase material 4 reacting with a spin coat material 3 is introduced into a spin coater cup 1 during spin coating. COPYRIGHT: (C)2006,JPO&NCIPI