ELECTRON ATTACHMENT ASSISTED FORMATION OF ELECTRICAL CONDUCTORS

摘要

A method for forming electrical conductors by electron attachment assistance is provided to form a conductive film from industrial powders or metal precursors at a lower temperature without increasing a process time. A method for forming electrical conductors by electron attachment assistance includes the steps of: coating a conductor material composed of one component selected from a group of metal particles, metal precursors, and a combination thereof on a substrate; exposing the conductor material to electrically activated reducing gas; and forming the electrical conductor by converting the component into metal.