| 摘要 |
PROBLEM TO BE SOLVED: To prevent the magnetic force generated by a linear motor of an X-Y table from adversely affecting a laser oscillator by devising the laser beam machine in such a manner that the electron beam of an arc lamp built in the laser oscillator is not bent by the influence of the magnetic force of the linear motor. SOLUTION: The outer peripheral part of the laser oscillator 5 is provided with a degaussing cover 42 which consists of a ferromagnetic material and encloses at least the arc lamp 5a. The degaussing cover 42 is composed of two layers of metallic sheets (lower shielding sheet 42a and upper shielding sheet 42b) consisting of silicon steel sheets, iron sheets or 'Permalloy (R)' sheets, etc. |
