发明名称 Method of synthesizing a compound of the formula Mn+1AXn, film of the compound and its use
摘要 A method of synthesizing or growing a compound having the general formula M<SUB>n+1</SUB>AX<SUB>n</SUB>( 16 ) where M is a transition metal, n is 1, 2, 3 or higher, A is an A-group element and X is carbon, nitrogen or both, which comprises the step of exposing a substrate to gaseous components and/or components vaporized from at least one solid source ( 13, 14, 15 ) whereby said components react with each other to produce the M<SUB>n+1</SUB>AX<SUB>n </SUB>( 16 ) compound.
申请公布号 US7402206(B2) 申请公布日期 2008.07.22
申请号 US20040497234 申请日期 2004.11.22
申请人 ABB AB 发明人 ISBERG PETER;PALMQUIST JENS-PETTER;JANSSON ULF;HULTMAN LARS;BIRCH JENS;SEPPAENEN TIMO
分类号 C30B23/02;C23C14/06;C30B23/00 主分类号 C30B23/02
代理机构 代理人
主权项
地址