| 发明名称 |
SEMICONDUCTOR MICRO-ANALYSIS CHIP AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
According to one embodiment, a semiconductor micro-analysis chip for detecting particles in a sample liquid includes a semiconductor substrate, a flow channel provided on a surface portion of the semiconductor substrate to allow the sample liquid to flow in the channel, and including a cap layer to cover at least an upper portion of the flow channel, a micropore provided at a part of the flow channel to allow the particles in the sample liquid to pass through the micropore, and a plurality of holes provided in the cap layer. |
| 申请公布号 |
US2016187295(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201615060506 |
申请日期 |
2016.03.03 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KOBAYASHI Kentaro;FURUYAMA Hideto |
| 分类号 |
G01N27/447;B01L3/00;G01N15/10 |
主分类号 |
G01N27/447 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor micro-analysis chip for detecting particles in a sample liquid comprising:
a semiconductor substrate; a flow channel provided on a surface portion of the semiconductor substrate to allow the sample liquid to flow therein, at least an upper portion of the flow channel being covered by a cap layer; a micropore provided at a part of the flow channel to allow the particles in the sample liquid to pass therethrough; and a plurality of holes provided in the cap layer. |
| 地址 |
Tokyo JP |
