MICROMECHANICAL GYROSCOPE STRUCTURE

摘要

A microelectromechanical gyroscope structure, and a method for manufacturing a microelectromechanical gyroscope structure, comprising a seismic mass and a spring structure suspending the seismic mass to a body element with a suspension structure. The spring structure allows a primary oscillation motion about a primary axis that is aligned with the plane of the seismic mass, and a secondary oscillation motion where at least part of the seismic mass moves in a second direction, perpendicular to the direction of the primary oscillation motion. The spring structure is attached to the seismic mass at both sides of the suspension structure and said spring structure is in torsional motion about the primary axis that is common with the primary oscillation motion. The structure of the gyroscope enables mechanical compensation of a quadrature error of the seismic mass by etching a compensation groove on the top face of the seismic mass.

主权项

1. A microelectromechanical gyroscope structure, comprising:
a seismic mass; and a primary spring structure suspending the seismic mass to a body element with a suspension structure, the primary spring structure allowing a primary oscillation motion where at least part of the seismic mass rotary oscillates in a first direction about a primary axis that is aligned with the plane of the seismic mass and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, wherein the primary spring structure is attached to the seismic mass on the opposite sides of the suspension structure and said primary spring structure is configured for torsional motion about the primary axis that is common with the primary oscillation motion.