| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement apparatus advantageous for improving measurement accuracy and robustness in measurement of a shape of a target object.SOLUTION: The measurement apparatus which measures a shape of a target object, comprises: a projection unit configured to project, on the target object, line pattern light including a plurality of lines formed from light having a first wavelength and identification pattern light formed from light having a second wavelength different from the first wavelength and including identification patterns for respectively identifying the plurality of lines; an imaging unit configured to obtain a first image corresponding to the line pattern light and a second image corresponding to the identification pattern light by separating the line pattern light and the identification pattern light projected on the target object based on wavelengths and imaging the line pattern light and the identification pattern light; and a processing unit for acquiring shape information of the target object based on the first image and the second image.SELECTED DRAWING: Figure 1 |
