| 摘要 |
PROBLEM TO BE SOLVED: To provide an etching device capable of efficiently etching only one surface of a plate-shaped object such as glass without using a protective material, etc.SOLUTION: A glass etching device 10 includes a plurality of transportation rollers 122, a spray etching unit 14, a spray control unit 20, a downward flow unit 16, a downward flow control unit 22, a sensor 18, and a CPU 242. The etchant is jetted at least from below to the transported glass substrate 100 in the spray etching unit 14, and air is fed from the downward flow unit 16 so that the etchant does not adhere to an upper surface of the glass substrate 100. Based on the detection information of the glass substrate 100 detected by the sensor 18, the CPU 242 controls the spray control unit 20 and the downward flow control unit 22.SELECTED DRAWING: Figure 1 |
