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发明名称
SEMICONDUCTOR DEVICE PROCESS
摘要
申请公布号
JPS51132970(A)
申请公布日期
1976.11.18
申请号
JP19750057998
申请日期
1975.05.15
申请人
SHIN NIPPON DENKI KK
发明人
NISHIMURA IKUHISA;SUYAMA NAOMI
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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