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发明名称
M DETERMINING PARAMETERS OF BORDER STATES AT SEMICONDUCTOR-DIELECTRIC INTERFACE
摘要
申请公布号
SU1429848(A1)
申请公布日期
1991.12.15
申请号
SU19864140317
申请日期
1986.09.02
申请人
INST RADIOTEKH ELEKTRON
发明人
VEDENEEV A.S.,SU;GOLDMAN E.I.,SU;ZHDAN A.G.,SU;KUZNETSOV A.V.,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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