发明名称 JUDGING METHOD FOR POCKET WIDTH OF WAFER JIG
摘要 PURPOSE:To judge whether a packet width of a water jig falls within an allowable tolerance range from a predetermined size or not without steps by drawing two chords of specific length on a curved plate of specific size and inserting the plate into the pocket. CONSTITUTION:The width of a pocket is a distance (a) between the inner peripheral sides 3a and 3b of the pocket 2 formed oppositely on the sides 3a, 3b of a wafer jig 1. A curved plate having a size larger than a diameter d+x is prepared, where d is the predetermined width of the pocket, and x is the maximum allowable tolerance. The curved plate is preferably a disk. One end of the disk 4 is represented by A, a chord AB of the length d+x is drawn from the end A, and a chord AC of the length d-x is also drawn from the end A. Then, the disk 4 prepared in this manner is inserted into the pocket 2 so that the end A of the disk contacts one end of the pocket 2. When the other end D held by the pocket of the disk 4 is disposed between the chord B and C, and pocket width (a) is disposed between the lengths d+x and d-x. In this case, the width of the pocket is judged to be allowed within a predetermined tolerance.
申请公布号 JPS62183136(A) 申请公布日期 1987.08.11
申请号 JP19860024729 申请日期 1986.02.06
申请人 NIPPON VALQUA IND LTD 发明人 YAMADA TOSHIO;TAKAHASHI SHINJI
分类号 H01L21/66;G01B5/14;H01L21/67;H01L21/677;H01L21/68 主分类号 H01L21/66
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