| 摘要 |
PURPOSE:To realize a high-accuracy and high-stability beam scanner by providing a means to compensate the positional deviation from a desired position of a laser beam positioned by a galvanometer type laser beam scanner. CONSTITUTION:A position positioned by a galvanometer type laser beam scanner 3 is moved so that an output by a semiconductor position detcting element 15 shows a zero potential, the positional deviation ( X, Y) of this time is obtained by an operation control device and stored in a storage circuit 17a in the operation control device 17. A semiconductor position detecting element 16 positions the whole working area of a galvanometer type laser beam scanner 3 repeatedly in a carrier system by an X-Y table, a calibration motion is made about each position, a positional deviation obtained in each corrected position is stored in the storage circuit 17. In usual motions after these calibration motions, a positional coordinate designated from a motion controller to the galvanometer type laser beam scanner 3 is corrected by the interpolation of the stored positional deviations. |
