发明名称 MANUFACTURE OF SINTERED CERAMIC STRUCTURE
摘要 A method for co-sintering ceramic/metal multilayered ceramic substrates (15) wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction camber are substantially eliminated. Binder-burnoff is substantially not aggravated during this process as well. The process is accomplished by applying selective forces (12, 19) to the surfaces of the ceramic substrates to control lateral movement while allowing Z-direction shrinkage movement. Frictional force means, pneumatic force means and weights are among the means used to supply forces. Cerium oxide is used in certain embodiments to enhance binder-burnoff.
申请公布号 JPS62260777(A) 申请公布日期 1987.11.13
申请号 JP19870106532 申请日期 1987.05.01
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 FUIRITSUPU RII FURAITSU;AARIN MARII FURANAGAN;JIYOSEFU MASHIYUU HAABIRUCHIYATSUKU;RESUTAA UIN HERON;JIYON URURITSUCHI NITSUKABOTSUKAA;ROBAATO UORUFU NIYUUFUAA;CHIYAARUZU HANPUTON PERI;SURINIBUASA ENU REDEI;SUCHIIBUN POORU YANGU
分类号 C04B35/638;C04B35/64;H01L21/48 主分类号 C04B35/638
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