| 摘要 |
PURPOSE:To make it possible to dry a large-sized substrate without damaging the substrate by a method wherein a drying device; which consists of a drying chamber, a recovery tank, a pressing tank, heating means, a liquid-transferring pump, nozzles, a swinging means and an exhaust damper; is used. CONSTITUTION:A substrate drying device consists of a drying chamber 6, a recovery tank 17 provided with water-separating means, a pressing tank 1, heating means 2 for heating the tank 1, a liquid-transferring pump 23, nozzles 7a-7c for spraying a fluid, a swinging means for swinging these nozzles and an exhaust damper 16. When a gear 33 of a motor 13 is rotated, a gear 32 meshed with the gear 33 is rotated, a coupling shaft 14 formed integrally with the gear 32 is swung and a link 29 is also swung centering around a fulcrum 31. Accordingly, as the like 26 makes a parallel motion, the nozzles 7a, 7b and 7c can be always maintained in a constant direction. Thereby, damage to a substrate and a possibility of fire are eliminated and the generation of dust is eliminated. |
