METALLIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, AND SURFACE ACOUSTIC WAVE DEVICE USING THE METALLIC THIN FILM AND THE METHOD THEREOF

摘要

By using a dual ion-beam sputtering apparatus (1), an aluminum thin-film (13) is formed on a glass substrate (12) made of an amorphous material. While radiating an ion beam (21) for assisting the film formation from an ion source (4) onto the glass substrate (12), the aluminum thin-film (13) is formed by depositing the sputtering ions which are generated by radiating an ion beam (22) onto an aluminum target (11).