发明名称 Flat packaged piezoelectric device using glass-ceramic composite material comprising forsterite
摘要 <p>In a crystal oscillator unit which serves as a flat packaged piezoelectric device and which comprises a base member (1), a quarts piece (2), and a cap member (3) sealed air-tight to the base member to enclose the quartz piece in cooperation with the base member, each of the base and the cap members is made of a glass-ceramic composite material in which 30 to 70% by weight of forsterite is dispersed in glass of a thermal expansion coefficient between 100 and 150 x 10<-><7>/ DEG C. The glass consists, in percent by weight, essentially of 50 to 70% of SiO2, 3 to 15% of Al2O3, 0 to 10% of ZnO, 0 to 8% of B2O3, 7 to 25% of at least one member of CaO, SrO, and BaO, and 13 to 27% of at least one member of Na2O, K2O, and Li2O. The glass and the forsterite are pulverized to an average particle diameter of 1 to 3 microns, mixed together with addition of fine powder of an average particle diameter of 0.1 to 1 micron of 0 to 5% by weight of at least one member of ZrO2, TiO2, SnO2, P2O5, and MoO3, and sintered at a temperature between 800 DEG C and 1000 DEG C. <IMAGE></p>
申请公布号 EP0595644(B1) 申请公布日期 1997.01.29
申请号 EP19930308648 申请日期 1993.10.29
申请人 NEC CORPORATION 发明人 GOTOH, YOSHIHIRO;MORISAKI, YASUTOSHI;MIKAZUKI, YOSHINOBU
分类号 C03C10/04;C03C14/00;C04B35/16;H01L41/053;H03H9/02;H03H9/05;H03H9/10;(IPC1-7):C03C14/00;H01L41/187;H01L41/24 主分类号 C03C10/04
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