发明名称 Ion molecule reaction mass spectroscopy method for gas analysis
摘要 The method, determining the concentration of particular atoms or molecules in a gas mixture, is based on the ionisation of the molecules in a reaction chamber (5) into which the gas is fed before reaching the spectrometer. The high kinetic energy of the primary ions and high collision energy between the ions and the neutral atoms or molecules must ensure sufficient signal intensity. This is achieved by maintaining a constantly lower potential difference between the optical elements (66,77) of the spectrometer and the ion optic device (4) of the reaction chamber, thus avoiding a potential barrier and ensuring that the products of the chamber are fully drawn down. This gives reliable ion molecule reaction (IMR) spectroscopy measurement.
申请公布号 DE19637205(A1) 申请公布日期 1998.03.26
申请号 DE19961037205 申请日期 1996.09.12
申请人 ATOMIKA INSTRUMENTS GMBH, 85764 OBERSCHLEISHEIM, DE 发明人
分类号 H01J49/42;(IPC1-7):G01N27/62;H01J49/06 主分类号 H01J49/42
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