发明名称 DRIVING DEVICE FOR VIBRATING ACTUATOR
摘要 PROBLEM TO BE SOLVED: To make it possible to drive a vibrating actuator irrespective of an ambient temperature by a method wherein, when an output frequency is changed so as to correspond to the change amount of a control signal, the frequency to be changed is corrected so as not to be changed due to a change in the ambient temperature. SOLUTION: The output frequency of an oscillator 7 is controlled by a control circuit 1, a control signal Vf is changed and output according to the change amount of a required displacement speed, the output frequency is changed by a frequency change means 8a so as to correspond to the change amount of the control signal Vf , and a change due to an ambient temperature in the change amount of the frequency is prevented by temperature-characteristic correction means 9a, 10a. Thereby, the gain of the displacement speed control of a vibrating actuator 200 can be kept constant irrespective of the ambient temperature. Consequently, a driving frequency corresponding to the control frequency Vf of the control circuit 1 can be output irrespective of the ambient temperature, the vibrating actuator 200 can be driven irrespective of the ambient temperature, the drive of the vibrating actuator in other modes can be prevented, and a cogging phenomenon can be prevented.
申请公布号 JPH10164874(A) 申请公布日期 1998.06.19
申请号 JP19960320140 申请日期 1996.11.29
申请人 NIKON CORP 发明人 FURUKAWA NOBUYUKI;MOGI KIYOSHI
分类号 G02B7/02;B06B1/04;G02B7/08;H02N2/00 主分类号 G02B7/02
代理机构 代理人
主权项
地址