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经营范围
发明名称
CHEMICAL VAPOR GROWTH DEVICE
摘要
申请公布号
JPH1129870(A)
申请公布日期
1999.02.02
申请号
JP19970184728
申请日期
1997.07.10
申请人
NISSAN MOTOR CO LTD
发明人
TANIMOTO SATOSHI
分类号
C23C16/44;C23C16/453;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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