发明名称 PROCESSING OF WORK AND CARRIER PLATE
摘要 PROBLEM TO BE SOLVED: To allow a hard, thin plate work to be machined surely without crackings or breaking it, when such a work is to be machined while being rotated. SOLUTION: A cylindrical ingot 6 is secured to a support member 8a, which extends along the length of the ingot 6 and includes a mounting stay 11 and at least an intermediate stay 9, with the ingot 6 attached to the stay 9. The ingot 6 and the stay 9 are thinly sliced together, after which works W1 obtained by the slicing are separated from one another with projections 22a made of the sliced stays 9 attached thereto. Each work W1 with the projection is fitted into a hole formed in a rotating carrier plate, so as to correspond to the shape of the work and into a setting hole 3a having a recessed groove 23 that allows the projection 22a to be fitted thereinto. Then, the work W1 with the projection is rotated, together with the plate 2a via the projection 22a and machined.
申请公布号 JPH11102889(A) 申请公布日期 1999.04.13
申请号 JP19970262034 申请日期 1997.09.26
申请人 NIPPEI TOYAMA CORP 发明人 NISHI KENICHIRO;NUKUI MITSURU;NAKAJIMA KAZUO;MURAI SHIRO;WADA TOYOHISA
分类号 B24B1/00;B24B27/06;B24B37/27;B24B37/28;B28D5/02;H01L21/304;H01L21/68;H01L21/683 主分类号 B24B1/00
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