| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser system having a considerably stable output beam parameter by supplying laser mix gas in a gas control unit based on the temporary pulse form of a beam measured by a detector. SOLUTION: A temporary pulse form 1 is communicated with a computer 16, a deviation signal is generated, based on the comparison of the temporary pulse form 1 with a desired pulse form which is previously stored, and the signal is transmitted to a gas dealing module 6. When the gas dealing module 6 receives the deviation signal, it starts the gas operation of micro halogen injection based on the deviation signal and mix gas is adjusted so that it is based on more preferable arbitrary gas composition. A processor 16 combines a pulse form signal and an energy deviation signal, which are transmitted to a gas control unit 28 and a discharge circuit. Thus, the composition of mix gas and driving voltage are controlled and they can be stabilized.
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