发明名称 |
MANUFACTURE OF NIOBIUM PROBE FOR SCANNING TUNNELING MICROSCOPE |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a niobium probe for scanning tunneling microscope capable of improving the position resolution at the time of STM observation. SOLUTION: A niobium wire (a purity of 99.9%) of 0.3 mm diameter is used as a probe material 2, while a hydrochloric acid aqueous solution of 25% concentration is used as an electrolytic solution 1. As a counter electrode 3, a flat plate electrode is used. By immersing the probe material 2 into the electrolytic solution 1 and applying an AC voltage of 30V between the probe material 2 and the counter electrode 3 from an AC power supply 4, electropolishing is executed. Then, an application voltage is dropped to 2 V in several steps. When the whole part of the probe material 2 immersed in the electrolytic solution 1 dissolves and the tip of a probe becomes separate from the liquid surface of the electrolytic solution 1, current stops and electrolytic etching automatically finishes.
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申请公布号 |
JP2000356643(A) |
申请公布日期 |
2000.12.26 |
申请号 |
JP19990167194 |
申请日期 |
1999.06.14 |
申请人 |
JAPAN SCIENCE & TECHNOLOGY CORP |
发明人 |
IWAMI MASAYUKI;FUJITA TAKEHIRO;UEHARA YOICHI;SHIODA SHISHO |
分类号 |
G01B7/34;C25F3/00;G01N37/00;G01Q60/16;(IPC1-7):G01N37/00 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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