发明名称 Method for producing quartz glass member and quartz glass member produced thereby
摘要 A silica glass member manufacturing method of the present invention includes the steps of making a silicon compound react in oxyhydrogen flame using a burner having a multi-tubular structure to obtain fine silica glass particles, depositing the fine silica glass particles on a support rotating and placed to oppose the burner to obtain a silica glass ingot with a temperature distribution in at least one plane perpendicular to a rotational axis of the silica glass ingot, the temperature distribution being symmetrical with respect to the rotational axis and having a maximal value between a center and a peripheral portion of the plane, and obtaining a distribution of signed birefringence values on the basis of birefringence values and directions of phase advance axes measured at a plurality of points in the plane perpendicular to the rotational axis of the silica glass ingot and cutting, from the silica glass ingot, a silica glass member whose signed birefringence values monotonously increase from the center to the peripheral portion of the plane. <IMAGE>
申请公布号 AU5848100(A) 申请公布日期 2001.01.22
申请号 AU20000058481 申请日期 2000.07.05
申请人 NIKON CORPORATION 发明人 KAZUHIRO NAKAGAWA;HIROYUKI HIRAIWA
分类号 C03B8/04;C03B19/14;C03C3/06 主分类号 C03B8/04
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