HIGH SPEED SWEEPING STRUCTURE FOR FULL FRAME TYPE IMAGE SENSOR HAVING LOD BLOOMING SUPPRESSING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a structure for a CCD high speed sweeping gate without necessity of providing individual contacts on a drain region. SOLUTION: An LOD 52 is used as a high speed sweeping gate 30. Thus, individual openings to be provided at a gate electrode for a drain contact is avoided. Accordingly, a more compact structure can be provided. A gate control is given by etching a hole in the CCD gate electrode on an overflowing channel region of the LOD structure, and overlaying this with one of a following gate electrode layer. A high speed sweeping operation is controlled by using the following gate electrode. Timing exhibits as to a two phase CCD operated by a clock signal of a storage mode.