| 摘要 |
PROBLEM TO BE SOLVED: To provide a face shape measuring device or the like capable of highly accurately measuring the face shape of an optical element such as a lens and a mirror. SOLUTION: On light emitted from a light source, mutually interfering measuring reflection light from a face 8a to be inspected and reference light of reflection light from a reference face 7a and in a face shape measuring device for measuring the face shape of the face 8a to be inspected by detecting a phase difference due to the interference, a diaphragm 3 is provided at a position conjugated with the face 8a to be inspected.
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