| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily correct misalignment between the optical axes of a snorkel lens and electrostatic lens. SOLUTION: An X-direction deflecting coil and a Y-direction deflecting coil are arranged on an exciting coil 8D of a snorkel lens 8. In a memory 13, a standard spectrum of a measurement sample (a spectrum measured when the optical axis O of the snorkel lens is aligned with the optical axis 9 of the electrostatic lens 3) is housed. A sample for deviation measurement is set as a sample for measuring its photoelectron spectrum. A calculating device 12 compares a measured spectrum of the sample for deviation sample coming through a detector 5 with a standard spectrum of the dislocation measurement which is read out of the memory 13, to calculated the deviation. It transmits a command to a deflection power source 11 so that a deflection current corresponding to the deviation is outputted.</p> |
