发明名称 Method of synthesising carbon nano tubes
摘要 Method of synthesizing carbon nano tubes (CNTs) on a catalyst layer formed on a support member, by catalytic deposition of carbon from a gaseous phase, whereby an ion beam is used prior to, during, and/or after formation of the carbon nano tubes for modifying the physical, chemical, and/or conductive properties of the carbon nanotubes.
申请公布号 US7033647(B2) 申请公布日期 2006.04.25
申请号 US20020301317 申请日期 2002.11.20
申请人 IMS-IONEN MIKROFABRIKATIONAS SYSTEME 发明人 TANG XINHE;MAUTHNER KLAUS;HAMMEL ERNST;LOESCHNER HANS;PLATZGUMMER ELMAR;STENGL GERHARD
分类号 C23C16/26;B01J37/02;B01J37/16;C01B31/02;C23C16/04;C23C16/18;C23C16/48;C23C16/513;C30B23/00;C30B33/00;D01F9/127 主分类号 C23C16/26
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