| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating apparatus capable of efficiently removing vaporized substance evaporated by heating and capable of preventing adverse effect on a substrate. SOLUTION: The heating apparatus 1 is configured in such a manner that hot air H is jetted by a plurality of heating blowers to a substrate W transported by a conveyor 65 to heat and fuse solder components on the substrate W thereby soldering is performed, and that the jetted hot air h is collected and returned. Further, between the heating blower 10c on a low temperature side and the heating blower 10 on a high temperature side among the plurality of heating blowers, there are stretched a first connecting body 4 and a second connecting body 5. In the first connecting body 4, a catalyst is provided that thermally decomposes a flux fume delivered together with the hot air from the heating blowers 10c. In the second connecting body 5, a vaporized substance cooling/collecting mechanism is installed that cools to liquefy and recover the flux fume delivered together with the hot air from the heating blowers 10. COPYRIGHT: (C)2008,JPO&INPIT
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