发明名称 THIN FILM DEPOSITION METHOD, LIQUID DROPLET-DISCHARGING DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin film deposition method which causes no stripe-shaped level differences in film thickness of thin films which are deposited by discharging liquid droplets, and also provide a liquid droplet-discharging device and a liquid crystal display device. SOLUTION: In the liquid droplet-discharging device, a first discharging head is arranged to overlap with a second discharging head when they are viewed from the main scanning direction, and a third discharging head 16C is arranged on a superposing route OA in which the scanning route of the first discharging head overlap with the scanning route of the second discharging head. Then, a difference value between a discharging amount which the first discharging head gives to a first liquid film FLF and a discharging amount which the second discharging head gives to a second liquid film FLL is made to be a discharging amount that the third discharging head 16 C gives to a third liquid film FLC. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008221132(A) 申请公布日期 2008.09.25
申请号 JP20070062990 申请日期 2007.03.13
申请人 SEIKO EPSON CORP 发明人 HAMA YOSHIKAZU;IWATA YUJI
分类号 B05D1/26;B05C5/00;G02F1/1337;G02F1/1341 主分类号 B05D1/26
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