发明名称 |
HEAD LIMITING MOVEMENT RANGE OF LASER SPOT AND ATOMIC FORCE MICROSCOPE HAVING THE SAME |
摘要 |
The present invention relates to a head with enhanced usability by limiting a movement range of a laser spot, and an atomic force microscope having the same. The head according to an embodiment of the present invention measures bending of a cantilever by using laser beams reflected from a surface of the cantilever in order to obtain information of a sample surface by using the tip of the cantilever. The head comprises: a spot movement means for moving a laser spot in order to allow the laser spot to be located on the surface of the cantilever; and a movement limiting means for limiting a movement range of the laser spot movable by the spot movement means to a preset range. |
申请公布号 |
KR20160078672(A) |
申请公布日期 |
2016.07.05 |
申请号 |
KR20140188493 |
申请日期 |
2014.12.24 |
申请人 |
PARK SYSTEMS CORP. |
发明人 |
PARK, SANG IL;KIM, DONG RYUL;AHN, BYOUNG WOON;CHUNG, SANG HAN |
分类号 |
G01Q60/42;G01Q70/10 |
主分类号 |
G01Q60/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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