发明名称 HEAD LIMITING MOVEMENT RANGE OF LASER SPOT AND ATOMIC FORCE MICROSCOPE HAVING THE SAME
摘要 The present invention relates to a head with enhanced usability by limiting a movement range of a laser spot, and an atomic force microscope having the same. The head according to an embodiment of the present invention measures bending of a cantilever by using laser beams reflected from a surface of the cantilever in order to obtain information of a sample surface by using the tip of the cantilever. The head comprises: a spot movement means for moving a laser spot in order to allow the laser spot to be located on the surface of the cantilever; and a movement limiting means for limiting a movement range of the laser spot movable by the spot movement means to a preset range.
申请公布号 KR20160078672(A) 申请公布日期 2016.07.05
申请号 KR20140188493 申请日期 2014.12.24
申请人 PARK SYSTEMS CORP. 发明人 PARK, SANG IL;KIM, DONG RYUL;AHN, BYOUNG WOON;CHUNG, SANG HAN
分类号 G01Q60/42;G01Q70/10 主分类号 G01Q60/42
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