| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid coating apparatus capable of favorably performing cleaning of a discharge port-forming surface of a coating head with a suction cleaning member.SOLUTION: Suction force working on a suction cleaning nozzle 9 is switched according to discharge operation, from a discharge port 7b of a coating head 7, that is performed just before cleaning operation that cleans, with the suction cleaning nozzle 9, coating liquid L1 and L2 stuck to a discharge port-forming surface 7a of the coating head 7. For example, the suction force working on the suction cleaning nozzle 9 when cleaning the discharge port-forming surface 7a stuck with the coating liquid by the discharge operation that flows the coating liquid out of the discharge port 7b, is made greater than force for cleaning the discharge port-forming surface 7a stuck with the coating liquid by the discharge operation that ejects the coating liquid in a droplet state out of the discharge port 7b.SELECTED DRAWING: Figure 5 |
