摘要 |
The prior art discloses machines which, for cooling the surface to be machined, have a gas supply line which opens into a gas outlet which is in the direct vicinity of the polishing disk. When CO2 is used as cooling gas, stoppages, which can be traced back to snow formation of the CO2, may occur in the line and in the gas outlet. In order to avoid blockages, the machine is assigned means for the supply of the liquid or supercritical CO2 which comprise a valve for regulating the throughflow quantity of the CO2 with an expansion nozzle, the valve being arranged inside the machine.
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