发明名称 Positive photoresist composition.
摘要 <p>A positive photoresist composition comprising an admixture of a photosensitizer comprising an ester of a dimer of a 2,3,4-trihydroxyalkylphenone having an alkyl group with from 6 to 10 carbon atoms, wherein the hydroxy groups of the trihydroxyalkylphenone have been esterified with 1,2-naphthoquinone diazide-4-sulfonyl chloride, the photosensitizer being present in the photoresist composition in an amount sufficient to uniformly photosensitize the photoresist composition; and a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition.</p>
申请公布号 EP0488712(A1) 申请公布日期 1992.06.03
申请号 EP19910310988 申请日期 1991.11.28
申请人 HOECHST CELANESE CORPORATION 发明人 POTVIN, ROBERT E.;ST. ALBAN, JONAS O.
分类号 G03F7/022;G03F7/004;H01L21/027 主分类号 G03F7/022
代理机构 代理人
主权项
地址