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发明名称
CONTACT HOLE FORMATION METHOD
摘要
申请公布号
JPH04276624(A)
申请公布日期
1992.10.01
申请号
JP19910038416
申请日期
1991.03.05
申请人
KAWASAKI STEEL CORP
发明人
NAKAMURA SATOSHI
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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