| 摘要 |
<p>PURPOSE:To improve the versatility and accuracy of an IC chip positioning device. CONSTITUTION:The title device is provided with an image pickup means which picks up the high-resolution image of an IC chip by connecting a microscope 2 to a CCD camera 1, arithmetic means which measures the position and angle of the IC chip, X-Y stage 5 which moves the corner of the IC chip into the visual field of the image pickup means, and a stage driving means, such as a Q-stage 4 which corrects the angle of the IC chip, etc.</p> |
