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发明名称
THINNER SUPPLY APPARATUS
摘要
申请公布号
KR0167275(B1)
申请公布日期
1999.02.01
申请号
KR19950047888
申请日期
1995.12.08
申请人
HYUNDAI MICRO ELECTRONICS CO., LTD.
发明人
JUN, YONG-MAN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
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地址
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