发明名称 Pulse laser with pulse energy trimmer
摘要 A pulse laser system for providing precise control of laser pulse energy. A fast pulse energy detector having response time in the nanosecond or sub-nanosecond range provides an electrical signal representing pulse energy to a trigger circuit, which integrates the signal and triggers an electro-optic switch when the integrated signal reaches a predetermined level. The operation of the electro-optic switch trims a portion of the pulse energy so that the resulting pulse energy is maintained at a consistent and desired level. In a preferred embodiment, the electro-optic switch includes a Pockels cell and at least one polarizing beam splitter. In this preferred embodiment, an optical delay line provides additional time for the pulse trimming components to operate.
申请公布号 US5852621(A) 申请公布日期 1998.12.22
申请号 US19970897665 申请日期 1997.07.21
申请人 CYMER, INC. 发明人 SANDSTROM, RICHARD L.
分类号 H01S3/097;G02F1/03;H01S3/00;H01S3/115;H01S3/137;(IPC1-7):H01S3/10 主分类号 H01S3/097
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