METHOD FOR PRODUCTION OF ULTRAPURE INERT GAS AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method usable for the purpose of electronic industry which enables the production of high-purity inert fluid of, for example, nitrogen or argon. SOLUTION: a) Compressed air is subjected to low-temp. distillation and b) unpure inert fluid contg. hydrogen impurity (H2 ) and residual impurity is recovered. c) At least part of the residual impurity included in the unpure inert fluid described above is adsorbed by at least one of beds of at least one kind of adsorbents and d) intermediately formed inert fluid contg. the hydrogen impurity is recovered. e) The hydrogen impurity included in the intermediately formed inert fluid is removed by permeation and f) the high-purity inert fluid in a gaseous state is recovered.