| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner and a method for transferring substrate wherein movement of a charger RRC at reticle replacement does not cause movement of the center of gravity of a device, and the replacement time of reticle is shortened for high throughput even with increased reticles. SOLUTION: A discordal changer RRC is provided between an exposure table ET and a change table CT, an older reticle C is replaced with a new reticle C on the change table CT during an exposure, the change RRC is, after completion of exposure, moved to upper position and a reticle A is transferred from the exposure table ET into a slot 1 while the reticle C from the change table CT into a slot 3, the changer RRC is rotated by 90 deg.C counterclockwise, the changer RRC is moved to a lower position and a reticle B is transferred from a slot 2 into the exposure table ET while a reticle D from a slot 4 to the change table CT. Since the changer RRC merely rotates, the center of gravity does not move, and a reticle is replaced quickly since only 90 deg.C rotation is made. |
