| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam device, such as an ion milling device or the like with a neutralizing filament supply capable of winding a neutralizing filament, without being disconnected. SOLUTION: The ion milling device 1A, as one of the ion beam devices, comprises a winding motor 44 provided on a winding drum 43 of the neutralizing filament supply for continuously supplying filament neutralizing ions from an ion source 10 and a feeding motor 45 mounted on a feeding drum 42 to be rotated. The winding motor 44 is operated to wind and collect the neutralizing filament F on the winding drum 43, and the same time, the feeding motor 34 is also rotated to deliver the neutralizing filament F from the feeding drum 42.
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