| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma cleaner which can be constituted compactly. SOLUTION: The cleaner comprises a base 12, guides 40, 41 provided on the base 12 for guiding an object 6, lid 13 which is open downward and supported from above movably to make contact with or away from the base 12 and forms a closed space 60 above the base 12 when contacting the base 12, contacting-separating means disposed at one side of the guides 40, 41 for contacting the lid 13 with or separating it from the base 12, and carrying means disposed at the other side of the guides 40, 41 for carrying the object 6 on the base 12 into below the lid 13 and/or carrying it out from below the lid 13. |
